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Atmospheric or Vacuum Wafer Transfer Robots

Machine manufacturers of wafer transport systems and chemical processing or cleaning equipment have extended the possibilities from our wide variety of high precision, clean room friendly planetary, strain wave, and hollow-bore rotary reducers that are preferable over belt drives and other reduction methods that can introduce contamination.

Nidec Drive Technology Corporation’s Planetary Gear Reducers, Strain Wave Gear Reducers, and Cycloidal Gear Reducers are very prevalent for wafer transfer robots and very cost effective for machine builders.

Selection Tool

High Precision Gear Reducer Solutions

PLANETARY

Inline & Right-angle Gear Reducers

High Precision

FLEXWAVE

Strain Wave Gear Reducers

Exceptional Repeatability & Positional Accuracy

KINEX

Cycloidal Gear Reducers

Smooth, Quiet, and Exceptional Movement